CMOS MEMS Hot-Film Thermoelectronic Flow Sensor
نویسندگان
چکیده
منابع مشابه
A Cmos Mems Capacitive Differential Flow Sensor for Respiratory Monitoring
This work presents a CMOS (complementary metal oxide semiconductor) micromachined capacitive differential flow sensor for respiratory monitoring. Airflow induces a pressure change on the suspended sensing plate and causes a capacitance change with respect to the electrodes. The microstructure fabricated by post-CMOS metal etch occupies an area of 320 × 230 m and has differential sensing capaci...
متن کاملA Surface Micromachined CMOS MEMS Humidity Sensor
This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromach...
متن کاملFabrication and Characterization of a CMOS-MEMS Humidity Sensor
This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of...
متن کاملNew Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
متن کاملAircraft Aerodynamic Parameter Detection Using Micro Hot-Film Flow Sensor Array and BP Neural Network Identification
Air speed, angle of sideslip and angle of attack are fundamental aerodynamic parameters for controlling most aircraft. For small aircraft for which conventional detecting devices are too bulky and heavy to be utilized, a novel and practical methodology by which the aerodynamic parameters are inferred using a micro hot-film flow sensor array mounted on the surface of the wing is proposed. A back...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IEEE Sensors Letters
سال: 2017
ISSN: 2475-1472
DOI: 10.1109/lsens.2017.2757086